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F-Theta


 

 

 

 

PARAMETER SPECIFICATION 
Wavelength (nm)
Depend on Laser
Laser Quality (M2)< 1.3
Spot size (Um; 1/e2 diameter)Customized
Image Format (scan area) (mm)TBD
Scan field angle (deg)TBD
RMS wavefront error< 0.07
Simulation Optimized : TelecentricYes or No
Scan linearity (f-theta Error; %)< 1
Telecentric Error (deg) < 3