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F-Theta
| PARAMETER | SPECIFICATION |
|
Wavelength (nm) |
Depend on Laser |
| Laser Quality (M2) | < 1.3 |
| Spot size (Um; 1/e2 diameter) | Customized |
| Image Format (scan area) (mm) | TBD |
| Scan field angle (deg) | TBD |
| RMS wavefront error | < 0.07 |
| Simulation Optimized : Telecentric | Yes or No |
| Scan linearity (f-theta Error; %) | < 1 |
| Telecentric Error (deg) | < 3 |